From jgarate at snf.stanford.edu Tue Dec 5 07:44:04 2000 From: jgarate at snf.stanford.edu (Jaime Garate) Date: Tue, 05 Dec 2000 07:44:04 -0800 Subject: Thermocouple replacement Message-ID: <3A2D0D44.554A68A2@snf.stanford.edu> Hi users, Ray has replace the right side H2SO4 thermocouple, and I have decontaminated with HCL clean. I have also pour fresh acid. Up for production!! Thanks, Jaime Garate From beckwith at snf.stanford.edu Thu Dec 7 14:37:03 2000 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Thu, 7 Dec 2000 14:37:03 -0800 (PST) Subject: missing 4" cassettes Message-ID: Folks: The cassettes to each wet bench are not for storage. Please put your wafers in your own storage boxes and return the "etch" cassettes to the wet bench. Thanks. Sharleen From king at snf.stanford.edu Thu Dec 7 15:31:17 2000 From: king at snf.stanford.edu (Robin King) Date: Thu, 7 Dec 2000 15:31:17 -0800 (PST) Subject: missing 4" cassettes In-Reply-To: Message-ID: On this note, when you bring cleaned wafers to staff for processing, please supply a storage box so there is something to unload them into afterwards. Otherwise we have to use lab cassettes which compounds the problem Sharleen is referring to. However, please don't clean your wafers and then put them back in your storage box before processing. Sometimes people do this and it contaminates their wafers, necessitating another clean. Thanks. Robin King On Thu, 7 Dec 2000, Sharleen Beckwith wrote: > > Folks: > > The cassettes to each wet bench are not for storage. Please put > your wafers in your own storage boxes and return the "etch" > cassettes to the wet bench. > > Thanks. > > Sharleen > From latta at snf.stanford.edu Tue Dec 12 11:00:41 2000 From: latta at snf.stanford.edu (Nancy Latta) Date: Tue, 12 Dec 2000 11:00:41 -0800 (PST) Subject: New stripper at wbnonmetal! Message-ID: Folks, We'd like you help in testing out a new positive photoresist stripper called Nanostrip. It is a stabilized alternative to H2SO4/H2O2 which is cleaner (0.07 vs 0.42 voltage shift according to the manufacturer's information), safer and less expensive that the solution we have been usiing. What does it mean to you? You will no longer have to mix sulfuric acid and hydrogen peroxide into the bath. *You will no longer need to add H2O2 to the bath because it will not boil away. In fact, please do not add H2O2 as it made create a hazardous condition. *The bath will run at a safer temp- 45C vs 120C. *Put wafers into the bath dry. The manufacturer suggests this. We need you help and feedback in evaluating the effectivenss of this new product. The right hand bath only is filled with Nanostrip. The left hand bath is still the standard H2SO4/H2O2. Please fill in the logsheet near the Nanostrip bath. It asks for information about how many wafers you stripped and how effective the stripper was. We are trying to determine the approximate lifetime of the bath. Please tell us on the log if your resist has been stsetched, implanted and what thickness of resist you have. We welcome any comments you have with regard to Nanostrip. The manufacturer's technical sheets are available upon request. Thanks for your help, Nancy and Jaime From jgarate at snf.stanford.edu Wed Dec 13 10:29:46 2000 From: jgarate at snf.stanford.edu (Jaime Garate) Date: Wed, 13 Dec 2000 10:29:46 -0800 Subject: NANOSTRIP Message-ID: <3A37C01A.A4A72E77@snf.stanford.edu> Hi users, I have install the new chemical call NANOSTRIP on the right side sulfuric and hydrogen peroxide bath. It is ready to be use!! If you have any comments please forward them to Nancy or myself. Please do not add HYDROGEN PEROXIDE to this bath!!!! Thanks, Jaime Garate From lian at Stanford.EDU Sun Dec 17 12:34:58 2000 From: lian at Stanford.EDU (Lian Zhang) Date: Sun, 17 Dec 2000 12:34:58 -0800 (PST) Subject: please pay attention to the cassettes Message-ID: <200012172034.MAA28229@saga10.Stanford.EDU> Users, Someone apparently messed up a wbdiff cassette with a wbnonmetal cassette. Right now a wbdiff cassette is sitting in a wbnonmetal box and a wbnonmetal cassette was left in the wbdiff dump rinser. Please note that your wafers can go from wbnonmetal but not the cassettes. Cassettes in the lab are all marked with a colored dot on the front side, and every wet bentch has a uniqe color. Please always pay attention to what cassette you are using. Lian