Uli Thumser uli at
Wed May 16 17:21:42 PDT 2001

Mary Tang wrote:

> Wet Bench Users (wbdiff, wbsilicide, wbnonmetal, wbgeneral):
> I am sure most of you would agree that things have been getting a bit
> out of control at the wet benches.  Many people are not certain of the
> proper procedures for handling chemicals, cassettes, and wafers.  And a
> few people don't seem to be exercising common courtesy.
> There are going to be a number of changes to the wet benches, in terms
> of operating procedures, policies, and equipment (see below).  These
> changes we hope will make the wet benches both safer and easier to use.
> The first thing we would like to do is to make sure everyone is starting
> from the same, basic understanding of how to use these benches.  New
> operating procedures have been written for these wet benches.  Everyone
> currently qualified on these wet benches will be required to read these
> operating procedures and take written tests to indicate their
> understanding of the procedures.  This policy is effective immediately.
> There will be a one month grace period in which currently qualified
> users will be able to remain qualified.  After May 31, anyone who has
> not turned in and passed the written test will lose their qualification.
> These tests will be available in Uli and Henry's office, CIS room 146,
> located next to the CIS Xerox/FAX room, under the stairs.
> A final word about the tests:  there really is nothing to prevent you
> from sharing answers -- but please don't.  The purpose of these tests is
> not to screen people from working at these benches, but to educate
> everyone on their proper and safe use.  Please abide by the Stanford
> Honor Code (even if you are from Cal.)  By submitting your tests you are
> saying that you understand and will follow these procedures -- and
> everyone will be expected to enforce them.
> Some of the other changes that are coming up:
> 1.  The Nanostrip hot pot will be converted back to a sulfuric/peroxide
> hot pot.  (We haven't given up on Nanostrip, but just put it aside until
> we understand it better.)  The announcement is imminent.
> 2.  We are in the process of reprogramming to controllers so that hot
> pots can be aspirated at a higher temperature.  This also requires
> checking the facilities to make sure we can handle this.  Acid changes
> will be much faster once this is done.
> 3.  There is serious discussion about gloves, safety gear and general
> ergonomics.  If you have any suggestions or ideas, the SNF staff would
> appreciate hearing them.
> If you have any questions regarding this requirement, or any of the
> specific wet bench procedures, don't hesitate to contact the SNF staff.
> Mary
> --
> Mary X. Tang, Ph.D.
> National Nanofabrication Users' Network
> Stanford Nanofabrication Facility
> CIS Room 136, Mail Code 4070
> Stanford, CA  94305
> (650)723-9980
> mtang at

More information about the wbnonmetal mailing list