From latta at snf.stanford.edu Thu Feb 12 10:03:19 2004 From: latta at snf.stanford.edu (Nancy Latta) Date: Thu, 12 Feb 2004 10:03:19 -0800 Subject: Spin drying 250um wafers Message-ID: <402BBFE7.2040001@snf.stanford.edu> Folks, Have any of you used a spin dryer to rinse/spin wafers which are 250um thick? I am asking because there is a potential labmember who would like to do this and I do not want to turn the wafers into 'glitter'. Thanks for you thoughts, -Nancy -- --- Nancy Latta Stanford Nanofabrication Facility CIS Bldg, 145 420 Via Palou Mall Stanford, CA, 94305 - 4070 (650) 725-6727 Fax (650) 725-6278 From beckwith at cis.Stanford.EDU Thu Feb 12 10:33:21 2004 From: beckwith at cis.Stanford.EDU (beckwith at cis.Stanford.EDU) Date: Thu, 12 Feb 2004 10:33:21 -0800 (PST) Subject: Spin drying 250um wafers In-Reply-To: <402BBFE7.2040001@snf.stanford.edu> Message-ID: ...have not tried 250, but I know for a fact that 100um wafers DO turn into glitter if you put them in the SRDers. On Thu, 12 Feb 2004, Nancy Latta wrote: > Folks, > > Have any of you used a spin dryer to rinse/spin wafers which are 250um > thick? I am asking because there is a potential labmember who would > like to do this and I do not want to turn the wafers into 'glitter'. > > Thanks for you thoughts, > > -Nancy > > From mike.daneman at arrayedfiberoptics.com Thu Feb 12 11:44:42 2004 From: mike.daneman at arrayedfiberoptics.com (Mike Daneman) Date: Thu, 12 Feb 2004 11:44:42 -0800 Subject: Spin drying 250um wafers In-Reply-To: Message-ID: We have processed 250um thick wafers, with a bunch of large holes in them to boot, and they did generally survive spin drying, although can occasionally break. It also obviously depends on the spin speed and how well balanced the particular SRD is. -Mike. -----Original Message----- From: beckwith at cis.Stanford.EDU [mailto:beckwith at cis.Stanford.EDU] Sent: Thursday, February 12, 2004 10:33 AM To: Nancy Latta Cc: wbnonmetal at snf.stanford.edu Subject: Re: Spin drying 250um wafers ...have not tried 250, but I know for a fact that 100um wafers DO turn into glitter if you put them in the SRDers. On Thu, 12 Feb 2004, Nancy Latta wrote: > Folks, > > Have any of you used a spin dryer to rinse/spin wafers which are 250um > thick? I am asking because there is a potential labmember who would > like to do this and I do not want to turn the wafers into 'glitter'. > > Thanks for you thoughts, > > -Nancy > > From jocelyn.nee at lightconnect.com Thu Feb 12 13:04:28 2004 From: jocelyn.nee at lightconnect.com (Jocelyn Nee) Date: Thu, 12 Feb 2004 13:04:28 -0800 Subject: Spin drying 250um wafers Message-ID: <2963ADCF008F5F4BA05BCD4B1720A96D01916ED3@lcpo.lightconnect.com> In the past, I've done 300um (they do just fine by themselves) and 100um at UC Berkeley. For 100um thick wafers, had to place normal dummy wafers surrounding the thin wafer for them to survive. I think for 250um thick wafers, if you do the same thing they most likely will not break. Jocelyn -----Original Message----- From: Mike Daneman [mailto:mike.daneman at arrayedfiberoptics.com] Sent: Thursday, February 12, 2004 11:45 AM To: beckwith at cis.Stanford.EDU; Nancy Latta Cc: wbnonmetal at snf.stanford.edu Subject: RE: Spin drying 250um wafers We have processed 250um thick wafers, with a bunch of large holes in them to boot, and they did generally survive spin drying, although can occasionally break. It also obviously depends on the spin speed and how well balanced the particular SRD is. -Mike. -----Original Message----- From: beckwith at cis.Stanford.EDU [mailto:beckwith at cis.Stanford.EDU] Sent: Thursday, February 12, 2004 10:33 AM To: Nancy Latta Cc: wbnonmetal at snf.stanford.edu Subject: Re: Spin drying 250um wafers ...have not tried 250, but I know for a fact that 100um wafers DO turn into glitter if you put them in the SRDers. On Thu, 12 Feb 2004, Nancy Latta wrote: > Folks, > > Have any of you used a spin dryer to rinse/spin wafers which are 250um > thick? I am asking because there is a potential labmember who would > like to do this and I do not want to turn the wafers into 'glitter'. > > Thanks for you thoughts, > > -Nancy > > From gladys at snf.stanford.edu Fri Feb 13 10:47:02 2004 From: gladys at snf.stanford.edu (Gladys Sarmiento) Date: Fri, 13 Feb 2004 10:47:02 -0800 Subject: Please clean up Message-ID: <402D1BA6.3050605@snf.stanford.edu> To ALL users: Most of the time, this wet bench is so messy in the morning. Early morning or night users, please make sure that you rinse off and dry the wetbench after use. -- Gladys Sarmiento Stanford Nanofabrication Facility 420 Via Mall, CIS 145 Stanford, CA 94305-4070 (650) 725-6199 gladys at snf.stanford.edu