Spin drying 250um wafers
Nancy Latta
latta at snf.stanford.edu
Thu Feb 12 10:03:19 PST 2004
Folks,
Have any of you used a spin dryer to rinse/spin wafers which are 250um
thick? I am asking because there is a potential labmember who would
like to do this and I do not want to turn the wafers into 'glitter'.
Thanks for you thoughts,
-Nancy
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Nancy Latta
Stanford Nanofabrication Facility
CIS Bldg, 145
420 Via Palou Mall
Stanford, CA, 94305 - 4070
(650) 725-6727
Fax (650) 725-6278
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