Spin drying 250um wafers

Nancy Latta latta at snf.stanford.edu
Thu Feb 12 10:03:19 PST 2004


Folks,

Have any of you used a spin dryer to rinse/spin wafers which are 250um 
thick?  I am asking because there is a potential labmember who would 
like to do this and I do not want to turn the wafers into 'glitter'.

Thanks for you thoughts,

-Nancy

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Nancy Latta
Stanford Nanofabrication Facility
CIS Bldg, 145
420 Via Palou Mall
Stanford, CA, 94305 - 4070 
(650) 725-6727
Fax (650) 725-6278





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