From gladys at snf.stanford.edu  Thu Jan 10 11:45:31 2002
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Jan 10, 2002 11:45:31 AM
Subject: Problem wbsilicide 2002-01-10 11:45:30: spin dryer keeps on turning on
Message-ID: <mailman.47.1357939087.26064.wbsilicide-pcs@snf.stanford.edu>




From dpant at snf.stanford.edu  Thu Jan 17 12:31:14 2002
From: dpant at snf.stanford.edu (dpant at snf.stanford.edu)
Date: Jan 17, 2002 12:31:14 PM
Subject: Problem wbsilicide 2002-01-17 12:31:12: Silicide spin-rinse dryer does not autoswitch
Message-ID: <mailman.48.1357939087.26064.wbsilicide-pcs@snf.stanford.edu>

After proper resistivity value is reached the dryer does not automatically switch to dry-mode (rinsing continues indefinitely)
Had same problem both with 3" and 4" Si wafers