Problem wbsilicide 2002-01-17 12:31:12: Silicide spin-rinse dryer does not autoswitch

dpant at snf.stanford.edu dpant at snf.stanford.edu
Thu Jan 17 12:31:14 PST 2002


After proper resistivity value is reached the dryer does not automatically switch to dry-mode (rinsing continues indefinitely)
Had same problem both with 3" and 4" Si wafers




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