From maurice at snf.stanford.edu Fri Apr 11 11:04:18 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Apr 2008 11:04:18 -0700 Subject: Shutdown wbsilicide SNF 2008-04-11 11:04:13: N2 leak Message-ID: Broken N2 hose under bench From jhaydon at snf.stanford.edu Fri Apr 11 11:24:23 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 11 Apr 2008 11:24:23 -0700 Subject: Shutdown wbsilicide SNF 2008-04-11 11:04:13: N2 leak Message-ID: N2 leak repaired From buchimax at snf.stanford.edu Sat Apr 26 15:00:57 2008 From: buchimax at snf.stanford.edu (buchimax at snf.stanford.edu) Date: Sat, 26 Apr 2008 15:00:57 -0700 Subject: Problem wbsilicide SNF 2008-04-26 15:00:56: wafer lost drainage did not work Message-ID: I lost my wafers in the gold-contaminated wb-silicide wetbench and was not able to drain it to get them out. From shott at stanford.edu Sun Apr 27 10:13:58 2008 From: shott at stanford.edu (John Shott) Date: Sun, 27 Apr 2008 10:13:58 -0700 Subject: Problem wbsilicide SNF 2008-04-26 15:00:56: wafer lost drainage did not work In-Reply-To: <20080426220057.7C01D65AA73@smtp2.stanford.edu> References: <20080426220057.7C01D65AA73@smtp2.stanford.edu> Message-ID: <4814B456.90707@stanford.edu> Markus: I've extracted your wafers from the hot pot at wbsilicide. As they were in the cassette labeled Gold Contaminated and there was an empty teflon cassette in the dump rinser also labeled Gold Contaminated, I placed your wafers in that cassette and have left them sitting in water in the dump rinser. I did not want to do anything to try to dry them. While I'm still looking around, the aspirator seemed to work for me to allow me to drain the sulfuric/peroxide from the hot pot. Although I cannot tell what the temperature is, there is an interlock on the aspirator that prevents the aspirator from turning on if the acid in the hot pot is too hot. Was the hot pot at something close to 120 degrees C when you tried to empty it? If so, this is likely why it would not drain for you. I think that the maximum temperature at which the acid can be drained with an aspirator is either 50 or 80 degrees C .... In any event, your wafers are sitting in water in a cassette in the dump rinser at wbsilicide. Happy processing, John From shott at snf.stanford.edu Sun Apr 27 10:14:47 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 27 Apr 2008 10:14:47 -0700 Subject: Problem wbsilicide SNF 2008-04-26 15:00:56: wafer lost drainage did not work Message-ID: Markus: I've extracted your wafers from the hot pot at wbsilicide. As they were in the cassette labeled Gold Contaminated and there was an empty teflon cassette in the dump rinser also labeled Gold Contaminated, I placed your wafers in that cassette and have left them sitting in water in the dump rinser. I did not want to do anything to try to dry them. While I'm still looking around, the aspirator seemed to work for me to allow me to drain the sulfuric/peroxide from the hot pot. Although I cannot tell what the temperature is, there is an interlock on the aspirator that prevents the aspirator from turning on if the acid in the hot pot is too hot. Was the hot pot at something close to 120 degrees C when you tried to empty it? If so, this is likely why it would not drain for you. I think that the maximum temperature at which the acid can be drained with an aspirator is either 50 or 80 degrees C .... In any event, your wafers are sitting in water in a cassette in the dump rinser at wbsilicide. Happy processing, John