From filip at snf.stanford.edu  Thu Sep 10 02:42:52 2009
From: filip at snf.stanford.edu (filip at snf.stanford.edu)
Date: Thu, 10 Sep 2009 02:42:52 -0700
Subject: Problem wbsilicide SNF 2009-09-10 02:42:51: casette still dirty
Message-ID: <mailman.266.1357939089.26064.wbsilicide-pcs@snf.stanford.edu>

one month later... still dirty.
black residue and particles...



From mtang at snf.stanford.edu  Thu Sep 17 16:53:32 2009
From: mtang at snf.stanford.edu (mtang at snf.stanford.edu)
Date: Thu, 17 Sep 2009 16:53:32 -0700
Subject: Problem wbsilicide SNF 2009-09-17 16:53:32: Do not use Spin rinse dryer!
Message-ID: <mailman.267.1357939089.26064.wbsilicide-pcs@snf.stanford.edu>

The spin rinse dryer needs repairs and decontamination -- do not use.  As backup, please use wbnitride for clean-grade wafers.