Problem wbsilicide SNF 2009-09-17 16:53:32: Do not use Spin rinse dryer!

mtang at snf.stanford.edu mtang at snf.stanford.edu
Thu Sep 17 16:53:32 PDT 2009


The spin rinse dryer needs repairs and decontamination -- do not use.  As backup, please use wbnitride for clean-grade wafers.  




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