From uli at snf.stanford.edu Wed Jun 16 18:14:35 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 16 Jun 2010 18:14:35 -0700 Subject: Problem wbsilicide SNF 2010-06-16 18:14:34: left dump rinser not fully functional. Message-ID: Pressing the up arrow key fills the tank only half way up with water and water sprayer is not working at all. From jhaydon at snf.stanford.edu Thu Jun 17 08:56:19 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 17 Jun 2010 08:56:19 -0700 Subject: Problem wbsilicide SNF 2010-06-16 18:14:34: left dump rinser not fully functional. Message-ID: repaired leak in pneumatic line From dkozak at snf.stanford.edu Thu Jun 24 06:55:41 2010 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Thu, 24 Jun 2010 06:55:41 -0700 Subject: Comment wbsilicide SNF 2010-06-24 06:55:41: resist flakes in left hot bath Message-ID: Have used left hot bath (pirahna) to strip resist from 10 wafers, coated in 1.6um of SPR 3612. Used standard 20 min at 120 degrees C. Afterwards, the liquid in the pot is brown, and large flakes of resist flow around the pot. Did not clear after 5 hours. Tried to clean the pot -- by aspirating the bath. Temperature is 94 degrees, but the pot will not drain -- gives alarm. From uli at snf.stanford.edu Thu Jun 24 16:20:13 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 24 Jun 2010 16:20:13 -0700 Subject: Comment wbsilicide SNF 2010-06-24 06:55:41: resist flakes in left hot bath Message-ID: added H2O2 From fungus at snf.stanford.edu Wed Jun 30 08:54:14 2010 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Wed, 30 Jun 2010 08:54:14 -0700 Subject: Problem wbsilicide SNF 2010-06-30 08:54:14: gold pot at 63C not draining Message-ID: left gold pot at 63C is not draining