Comment wbsilicide SNF 2010-06-24 06:55:41: resist flakes in left hot bath

dkozak at snf.stanford.edu dkozak at snf.stanford.edu
Thu Jun 24 06:55:41 PDT 2010


Have used left hot bath (pirahna) to strip resist from 10 wafers, coated in 1.6um of SPR 3612.   Used standard 20 min at 120 degrees C.
Afterwards, the liquid in the pot is brown, and large flakes of resist flow around the pot.  Did not clear after 5 hours.
Tried to clean the pot -- by aspirating the bath.  Temperature is 94 degrees, but the pot will not drain -- gives alarm.  




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