From jhaydon at snf.stanford.edu Tue Nov 2 07:04:23 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 2 Nov 2010 07:04:23 -0700 Subject: Problem wbsilicide SNF 2010-10-31 13:13:26: spin dryer did not spin Message-ID: From uli at snf.stanford.edu Tue Nov 9 18:03:09 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 9 Nov 2010 18:03:09 -0800 Subject: Problem wbsilicide SNF 2010-10-26 15:00:16: Floating material Message-ID: Cleaned From uli at snf.stanford.edu Fri Nov 19 15:36:40 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 19 Nov 2010 15:36:40 -0800 Subject: Comment wbsilicide SNF 2010-10-31 13:53:55: spin dryer ok Message-ID: thanks From dkozak at snf.stanford.edu Tue Nov 23 21:06:25 2010 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Tue, 23 Nov 2010 21:06:25 -0800 Subject: Comment wbsilicide SNF 2010-11-23 21:06:25: Wrong mix in bath or water addition??? Message-ID: Using 9:1 Sulfuric acid: hydrogen peroxide bath today to strip resist: The bath was changed only one day before, and liquid level was slighlty above the full mark (looked OK). After heating the bath to 120 degrees, put in my cassette with four wafers, covered with 7 um SPR 220-7 resist. two cycles of 20 min each FAILED TO STRIP RESIST!!! (a spray with acetone does more). Had to dump a little of liquid and pour some Hydrogen peroxide to replenish. After that, PR was stripped in 5 seconds. Either the change of bath was done to wrong concentrations, or people who did not want to replenish hydrogen peroxide just added water to the bath. I would expect some evaporation of peroxide after a day, so the liquid should not have been at above full level. So, latter hypothesis is the more likely one.