From uli at snf.stanford.edu Wed Oct 12 09:58:01 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 12 Oct 2011 09:58:01 -0700 Subject: Problem wbsilicide SNF 2011-08-22 14:53:35: gold contamniated sign is missing Message-ID: labeled From grahamab at snf.stanford.edu Fri Oct 14 11:31:11 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Fri, 14 Oct 2011 11:31:11 -0700 Subject: Comment wbsilicide SNF 2011-10-14 11:31:10: SRD doesn't always spin Message-ID: noticed this problem last week as well. if it has been sitting a while, it doesn't start spinning during the rinse cycle. stopping it and manually turning it a small bit seems to be enough to get it moving on the next try, but it seems like there's a large resistance to it initially moving. From dkozak at snf.stanford.edu Tue Oct 18 05:46:33 2011 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Tue, 18 Oct 2011 05:46:33 -0700 Subject: Comment wbsilicide SNF 2011-10-18 05:46:32: SRD not spinning Message-ID: Concurr with previous comment. No spin during dry cycle. Had to take wafers to litho spinner From uli at snf.stanford.edu Tue Oct 25 15:42:01 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 25 Oct 2011 15:42:01 -0700 Subject: Problem wbsilicide SNF 2011-07-22 17:04:19: New SC-1 Message-ID: change it to comment From uli at snf.stanford.edu Tue Oct 25 15:43:50 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 25 Oct 2011 15:43:50 -0700 Subject: Comment wbsilicide SNF 2011-10-25 15:43:50: New SC1 since July 22 Message-ID: Change in standard pre-furnace clean procedures: Instead of the 4:1 sulfuric-peroxide/HCl-SC2/HF dip sequence that has been standard at SNF for many years, we are going to use a standard RCA: SC1/SC2/HF dip. SC1 consists of 5:1:1 H2O/H2O2/NH4OH (Ammonium Hydroxide). The SC1 bath must be changed every four hours and the addition of H2O2 is allowed, much the same as the SC2 bath, 5:1:1 H2O:H2O2:HCl. The bath temperature is 50C and the time remains 10 minutes. From jaehlee at snf.stanford.edu Fri Oct 28 18:08:40 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Fri, 28 Oct 2011 18:08:40 -0700 Subject: Comment wbsilicide SNF 2011-10-28 18:08:40: SRD Message-ID: It didn't start spinning at first attempt. Restarted and it went all okay.