Comment wbsilicide SNF 2011-10-25 15:43:50: New SC1 since July 22

uli at snf.stanford.edu uli at snf.stanford.edu
Tue Oct 25 15:43:50 PDT 2011


Change in standard pre-furnace clean procedures:
Instead of the 4:1 sulfuric-peroxide/HCl-SC2/HF dip sequence that has been standard at SNF for many years, we are going to use a standard RCA: SC1/SC2/HF dip.
SC1 consists of 5:1:1 H2O/H2O2/NH4OH (Ammonium Hydroxide).
The SC1 bath must be changed every four hours and the addition of H2O2 is allowed, much the same as the SC2 bath, 5:1:1 H2O:H2O2:HCl.  The bath temperature is 50C and the time remains 10 minutes.




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