From garyyamanet at netscape.net Thu Jul 11 11:07:16 2002 From: garyyamanet at netscape.net (garyyamanet at netscape.net) Date: Thu, 11 Jul 2002 14:07:16 -0400 Subject: need bench 7/12 FRI for KOH decontam. late afternoon for ~3hrs Message-ID: <6645C9D0.188F377A.4A9981E6@netscape.net> please let me know if this will be a problem Thanks - gary __________________________________________________________________ Your favorite stores, helpful shopping tools and great gift ideas. Experience the convenience of buying online with Shop at Netscape! http://shopnow.netscape.com/ Get your own FREE, personal Netscape Mail account today at http://webmail.netscape.com/ From mcvittie at snf.stanford.edu Fri Jul 19 17:55:49 2002 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Fri, 19 Jul 2002 17:55:49 -0700 Subject: Results of testing Wet Benches for Sodium Message-ID: <3D38B515.E2D3AE44@snf.stanford.edu> Wet bench Users, As part of the clean up after the Pyrex glass wafer went through WBdiff and Wbnonmetal, we did a series of sodium contamination tests. For these tests, we exposed clean 1000A oxide Si wafers to the HF baths in WBdiff and Wbnonmetal, fabricated alumimum gate capaciators and tested for Na using the Bias Temperature Stress (BTS) CV method. In addition, to testing the HF baths, we also tested the effect of dipping clean oxide wafers into a container of 50:1 HF, which had been exposed to a Pyrex wafer for 2 minutes. The expectation was that the Pyrex wafer would contaminate the bath with Na and pass on the Na to following clean wafers going through the bath. The results were surprized good, in that not only did the HF tanks in the wet benches show no contamination, the wafer from the intensionally contaminated HF container also showed no Na contamination to the oxide wafers. In all cases, the mobile ion level was found to be below 5E10/cm2 which is quite good. The conclusions are that the HF tanks in the wet benches were successfully decontaminated, and that low levels of Na in a HF bath does not came out of solution onto clean oxide surfaces. These results also say that the other parts of our lab needed for these MOS capacitors are all in good shape in term of mobile ion contamination. These other parts include: the furnaces (Tylan #1 and #7, the DI water system, the WBdiff bench with the HF tanks from the WBsilicide, the Gryphon sputter deposition system, the litho area, the Wbmetal bench, the spin dryers and the Tylan FGA tube. Thanks for all your cooperation in help to keep the lab contamination free. Jim McVittie From garyyamanet at netscape.net Mon Jul 29 11:11:49 2002 From: garyyamanet at netscape.net (garyyamanet at netscape.net) Date: Mon, 29 Jul 2002 14:11:49 -0400 Subject: Will be needing for KOH decontam WED afternoon, 8/1. Message-ID: <23A4F66E.51499DF7.4A9981E6@netscape.net> please let me know if this will be a problem. Thanks - Gary __________________________________________________________________ Your favorite stores, helpful shopping tools and great gift ideas. Experience the convenience of buying online with Shop at Netscape! http://shopnow.netscape.com/ Get your own FREE, personal Netscape Mail account today at http://webmail.netscape.com/ From garyyamanet at netscape.net Mon Jul 29 11:42:57 2002 From: garyyamanet at netscape.net (garyyamanet at netscape.net) Date: Mon, 29 Jul 2002 14:42:57 -0400 Subject: Sorry, got my dates mixed, TUE 7/31 for decontam Message-ID: <77F5A81C.67AF990D.4A9981E6@netscape.net> __________________________________________________________________ Your favorite stores, helpful shopping tools and great gift ideas. Experience the convenience of buying online with Shop at Netscape! http://shopnow.netscape.com/ Get your own FREE, personal Netscape Mail account today at http://webmail.netscape.com/ From garyyamanet at netscape.net Mon Jul 29 12:29:26 2002 From: garyyamanet at netscape.net (garyyamanet at netscape.net) Date: Mon, 29 Jul 2002 15:29:26 -0400 Subject: date corrected, TUE, 7/30 Message-ID: <4D6AD8DD.74D84E03.4A9981E6@netscape.net> __________________________________________________________________ Your favorite stores, helpful shopping tools and great gift ideas. Experience the convenience of buying online with Shop at Netscape! http://shopnow.netscape.com/ Get your own FREE, personal Netscape Mail account today at http://webmail.netscape.com/