Wet Bench Use Poll

Nancy Latta latta at snf.stanford.edu
Tue Apr 29 15:03:33 PDT 2003

Dear Wbsilicide User,

Due to increasing interest in fusion (sometimes called direct) wafer 
bonding and the cleaning required for good bonds, we are taking a look 
at the use of the silicide wet bench.  Can you please take a moment and 
reply to this email with a short description of what you use the bench 
for, esp if you are actually using silicides in your process.

Thanks you for responding,


Nancy Latta
Stanford Nanofabrication Facility
CIS Room 145
420 Via Palou Mall
Stanford, CA 94305-4070
(650) 725-6727
latta at snf.stanford.edu

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