wbsilicide move

Mary Tang mtang at snf.stanford.edu
Mon Sep 27 11:50:35 PDT 2004

Hi everyone --

The 6" conversion is rumbling along...  Part of this requires moving 
wbsilicide across the aisle.  The actual move is anticipated to take 
only a few days, but maintenance is requesting that we be prepared for 
two weeks.  Based on previous discussions when this was first planned 
last year, the primary need for wbsilicide appears to be for 
decontamination purposes, following KOH etching.  We are working on a 
backup plan which we'll post shortly.  If you have other process needs, 
please let us know and we will try to work out some temporary solution 
with you.

Thanks for your attention and patience --


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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