KOH decontamination today

Saurabh Chandorkar saurabhc at stanford.edu
Thu Sep 7 16:42:42 PDT 2006


I plan to carry out KOH decontamination of my wafers today at 5:30 pm. It 
takes roughly two hours to carry out the whole clean up of the pots. I 
hope this is ok with all the users.


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