From mtang at stanford.edu  Sun Feb 18 23:39:29 2007
From: mtang at stanford.edu (Mary Tang)
Date: Sun, 18 Feb 2007 23:39:29 -0800
Subject: wbdiff problems
Message-ID: <45D95431.90603@stanford.edu>

Labmembers --

Our deepest apologies -- It looks like wbdiff is having a heck of a time 
this weekend (as well as a number of labmembers).  Although it is not 
shutdown, please do not try to use the HCl pot or the HF dump rinser at 
wbdiff.

Instead, wbsilicide can be used for diffusion cleans -- BUT ONLY IF IT 
IS FIRST DECONTAMINATED.  Instructions for decontamination are listed on 
the Coral problem note for wbsilicide.  If the next person who needs a 
diffusion clean could do this decontamination (and write it up on Coral, 
so that no one uses it for non-diff clean processing), he/she would earn 
the gratitude of many labmembers - and a lunch on me.

Again, on behalf of the staff, our apologies --

Mary





From mtang at stanford.edu  Tue Feb 20 10:23:40 2007
From: mtang at stanford.edu (Mary Tang)
Date: Tue, 20 Feb 2007 10:23:40 -0800
Subject: Temporary limits on wbsilicide usage
Message-ID: <45DB3CAC.20204@stanford.edu>

wbsilicide users:

Wbsilicide has just been decontaminated for diffusion clean processing.  
As you may know, wbdiff is experiencing some intermittent electronic 
problems.  We are using wbsilicide as possible backup for wet diffusion 
cleans until we are pretty sure wbdiff is working reliably.  Until then, 
wbsilicide is considered clean and can be used only for diffusion clean 
processing.  If you need to do decontamination processing or 
non-diffusion clean/silicide processing, please contact Mary Tang 
(mtang at snf.stanford.edu, X3-9980) or Nancy Latta 
(latta at snf.stanford.edu, X5-6727).

Our sincere apologies for the inconvenience and thanks for your 
patience.  Jim Haydon thinks he may have nailed the problems this time, 
so hopefully, this situation won't be for more than a few days.

Mary

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu