From cduchat at stanford.edu  Wed May 23 17:36:32 2012
From: cduchat at stanford.edu (Christophe Duchateau)
Date: Wed, 23 May 2012 17:36:32 -0700 (PDT)
Subject: left hot pot (gold contaminated 9:1 Sulfuric acid : hydrogen
 peroxide) out of order for a few hours
In-Reply-To: <748949179.136084148.1337819370846.JavaMail.root@zm05.stanford.edu>
Message-ID: <1197395461.136091902.1337819792136.JavaMail.root@zm05.stanford.edu>

All:

One of my wafers broke in the gold contaminated left hot pot of wbsilicide.

I need this bath to cool down before being able to drain it, rinse... then remove the piece of wafer, and pour new chemicals for the next user.

As it will take quite a long time, I will come back later tonight to proceed, since then, please don't use the left hot pot (the rest of the wet bench can be used normally).

I put also a comment on coral immediately, and will shoot you another mail when everything will be done.

Sorry about that.

Christophe Duchateau (cduchat)


From clchang6 at stanford.edu  Wed May 23 22:13:35 2012
From: clchang6 at stanford.edu (Chienliu Chang)
Date: Wed, 23 May 2012 22:13:35 -0700
Subject: KOH decontamination_Chienliu
Message-ID: <F18B8AAA3FB74F8E891740B67518B29D@corp.cusa.canon.com>

Dear all,

I plan to process KOH decontamination in the morning of May 24th.
It might take few hours.
I am sorry for this inconvenience for you.
Thanks.
Best regards,

Chienliu
-------------------------------------------------
Chienliu Chang, Ph.D.

Room 104
Ginzton Laboratory
Center for Nanoscale Science & Engineering
Stanford University
348 Via Pueblo, Stanford, CA 94305-4088 
  
Phone: 650-725-2265
Email: clchang6 at stanford.edu
       clchang6 at ntu.edu.tw
-------------------------------------------------


From cduchat at stanford.edu  Thu May 24 00:10:24 2012
From: cduchat at stanford.edu (Christophe Duchateau)
Date: Thu, 24 May 2012 00:10:24 -0700 (PDT)
Subject: left hot pot (gold contaminated 9:1 Sulfuric acid : hydrogen
 peroxide) out of order for a few hours
In-Reply-To: <1197395461.136091902.1337819792136.JavaMail.root@zm05.stanford.edu>
Message-ID: <893677058.136404370.1337843424132.JavaMail.root@zm05.stanford.edu>

The hot pot is now clean and ready for the next user.

Again, sorry for the inconvenience.

Christophe



----- Mail original -----
De: "Christophe Duchateau" <cduchat at stanford.edu>
?: wbsilicide at snf.stanford.edu
Envoy?: Mercredi 23 Mai 2012 17:36:32
Objet: left hot pot (gold contaminated 9:1 Sulfuric acid : hydrogen peroxide) out of order for a few hours

All:

One of my wafers broke in the gold contaminated left hot pot of wbsilicide.

I need this bath to cool down before being able to drain it, rinse... then remove the piece of wafer, and pour new chemicals for the next user.

As it will take quite a long time, I will come back later tonight to proceed, since then, please don't use the left hot pot (the rest of the wet bench can be used normally).

I put also a comment on coral immediately, and will shoot you another mail when everything will be done.

Sorry about that.

Christophe Duchateau (cduchat)