Temperature controlled ultrasonic bathtub

Luigi Scaccabarozzi scaccag at Stanford.EDU
Fri Apr 12 18:41:00 PDT 2002

Hello all,
I fully agree with Evan, it would be great to have such a device

On Fri, 12 Apr 2002, Evan Thrush wrote:

> Hello fellow wbgaassol users,
> Are you tired of waiting hours, even days to strip photoresist from your
> wafer after dry etching with the plasma quest?  Are you tired of waiting
> hours to perform liftoff metalization?  I am pretty tired of it and I think
> there are some pretty simple modifications to the bench that will make our
> lives much easier.  Many months ago, SNF purchased a nice temperature
> controlled untrasonic bathtub for this bench.  It has not been available to
> us because SNF staff wants to make modifications to the bench for the safe
> instillation of the bathtub.  Not much has been done towards the
> instillation for several months.  I think I have got the ball rolling again
> on the instillation and supposedly the instillation will be complete in
> several weeks.  It is important for users of the bench to let SNF staff
> know how much this modification will be valued, so that they will complete
> the task in a timely manner and also feel like their hard work is valued.
> Anyway, I plan on using this tube to strip photoresist with 1165
> remover.  The temperature controlled bath will be a huge benefit when
> compared to the difficult to use analog hot plates that are currently at
> the bench.  I frankly feel that the analog hot plate are dangerous because
> the temperature is difficult to control.  It is important to not allow the
> temperature of the removing solvent not to exceed the flashpoint, which for
> 1165 is 85 C.  I plan on heating the solvent up to about 60 C and this
> combined with ultrasonic vibration will expedite the removal of the resist.
> Thanks you for your time and I look forward to hearing feedback on this new
> processing improvement,
> Evan
> ------------------------------------------------------------------------------------------------------
> Evan Thrush
> Stanford University; E.E. PhD Candidate
> CIS-X Rm. B113-21, Stanford, CA 94305-4075
> Phone: (650)725-2774 E-mail: ethrush at snow.stanford.edu
> Fax: (650)723-4659 Homepage: http://snow.stanford.edu/~ethrush

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