Comment woollam SNF 2008-07-23 17:45:40: strange fits for 9pt oxide qual

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Wed Jul 23 17:45:43 PDT 2008


When running the 9pt oxide qual recipe, there are very strange results when measuring the 6th point [-3,0].  The typically smoothe plot as a function of wavelength instead had many max and min, like a lie detector test.  This throws off the fit, and screws up the n value so the following fits are all off as well.  This happened for three different wafers, and after turning the lamp on and off......




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