Problem woollam SNF 2008-07-25 09:52:09: Couldn't read STS PECVD test wafers

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri Jul 25 09:52:10 PDT 2008


correctly. Refective index was all over the place and thickness
also for nitride. Oxide test wafer was worse.




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