From emyers at snf.stanford.edu Mon Jan 4 14:00:34 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jan 2010 14:00:34 -0800 Subject: Comment woollam SNF 2010-01-04 14:00:34: Holiday Shutdown Restart Message-ID: Restarted system and verified thickness measurements. From narii at snf.stanford.edu Thu Jan 14 14:01:30 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Thu, 14 Jan 2010 14:01:30 -0800 Subject: Problem woollam SNF 2010-01-14 14:01:29: RTO thickness measurement result is weird Message-ID: For the test, I stripped new wafers with HF dip, and measured. Woollam always shows 20~150A of thickness depending on where it measures - which was less than 10A before. Even I turn wafers 180 degree, measurement profile is the same - even if it actually measures different place on the wafer. From kcbalram at snf.stanford.edu Fri Jan 15 20:04:59 2010 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Fri, 15 Jan 2010 20:04:59 -0800 Subject: Problem woollam SNF 2010-01-15 20:04:59: Stage tilt Message-ID: The Wollam stage automatically sets default tilt values of Tilt 1: 0.5 Tilt2 : -0.4 Even when these values are set to zero manually, the system resets them and hence the beam is offset from the aperture The strange thing is that the align sample routine does not fail even when the lamp is turned off and the alignment position always returns to the tilt values mentioned above..... Tried restarting the program but it did not help.... Krishna & Dany From emyers at snf.stanford.edu Wed Jan 27 10:29:07 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 27 Jan 2010 10:29:07 -0800 Subject: Problem woollam SNF 2010-01-15 20:04:59: Stage tilt Message-ID: System has been used many times without a problem. From emyers at snf.stanford.edu Wed Jan 27 10:30:00 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 27 Jan 2010 10:30:00 -0800 Subject: Problem woollam SNF 2010-01-14 14:01:29: RTO thickness measurement result is weird Message-ID: User did not respond to questions regarding how the model was developed for the measurement.