Problem woollam SNF 2010-01-14 14:01:29: RTO thickness measurement result is weird

narii at snf.stanford.edu narii at snf.stanford.edu
Thu Jan 14 14:01:30 PST 2010


For the test, I stripped new wafers with HF dip, and measured. Woollam always shows 20~150A of thickness depending on where it measures - which was less than 10A before. Even I turn wafers 180 degree, measurement profile is the same - even if it actually measures different place on the wafer.




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