Comment woollam SNF 2010-11-13 00:04:09: push pins down

ajamo at snf.stanford.edu ajamo at snf.stanford.edu
Sat Nov 13 00:04:10 PST 2010


I was using 9pt oxide measurement in VASE manager,  points 7-10 were always bad.  I rotated the wafer 90 deg and area that measured bad before was okay.   I noticed the white pins that keep the 4" wafer centered on the stage, the left one was not pushed all the way down and sticking up, it was interfering with the beam.  Just FYI




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