From jimkruger at yahoo.com  Wed Mar  6 11:58:47 2013
From: jimkruger at yahoo.com (jimkruger at yahoo.com)
Date: Wed, 6 Mar 2013 11:58:47 -0800 (PST)
Subject: [woollam-pcs] Problem woollam SNF 2013-03-06 11:58:46: Replacing
 wafer pins--use care
Message-ID: <32031297.48.1362599927654.JavaMail.coral@snc-coraldb.stanford.edu>

When changing wafer sizes (and back again), please insure that the teflon pins are pushed all the way into their sockets.  If not, they can interfere with the beam and give erroneous readings.  This is the second time I have seen this.

From cechang at stanford.edu  Tue Mar 12 22:03:44 2013
From: cechang at stanford.edu (cechang at stanford.edu)
Date: Tue, 12 Mar 2013 22:03:44 -0700 (PDT)
Subject: [woollam-pcs] Problem woollam SNF 2013-03-12 22:03:43: low dc bias
Message-ID: <28991818.9.1363151024191.JavaMail.coral@snc-coraldb.stanford.edu>

Ran program 3. The first trial run for 10min went OK, though the etch rate was only 20.6nm/min. In the next run, the recipe stopped at 0.02s in the etch step. In the 3rd run, the recipe stopped at about 1 min into the etch step. DC ~ -230V/-530V in the 3rd run.

From cechang at stanford.edu  Tue Mar 12 22:06:42 2013
From: cechang at stanford.edu (cechang at stanford.edu)
Date: Tue, 12 Mar 2013 22:06:42 -0700 (PDT)
Subject: [woollam-pcs] Comment woollam SNF 2013-03-12 22:06:42: The last
 comment was meant for amtetcher EOM
Message-ID: <1480308.10.1363151202563.JavaMail.coral@snc-coraldb.stanford.edu>


From mmrincon at stanford.edu  Mon Mar 18 09:58:22 2013
From: mmrincon at stanford.edu (mmrincon at stanford.edu)
Date: Mon, 18 Mar 2013 09:58:22 -0700 (PDT)
Subject: [woollam-pcs] Problem woollam SNF 2013-03-12 22:03:43: low dc
	bias
Message-ID: <18986007.89.1363625902251.JavaMail.coral@snc-coraldb.stanford.edu>

comment for incorrect tool

From mmrincon at stanford.edu  Mon Mar 18 09:58:31 2013
From: mmrincon at stanford.edu (mmrincon at stanford.edu)
Date: Mon, 18 Mar 2013 09:58:31 -0700 (PDT)
Subject: [woollam-pcs] Comment woollam SNF 2013-03-12 22:06:42: The last
 comment was meant for amtetcher EOM
Message-ID: <28258955.90.1363625911281.JavaMail.coral@snc-coraldb.stanford.edu>

see subject