From ahazeghi at stanford.edu  Tue Mar 25 18:00:24 2008
From: ahazeghi at stanford.edu (Arash Hazeghi)
Date: Tue, 25 Mar 2008 18:00:24 -0700
Subject: PMMA thickness measurement
Message-ID: <20080325180024.6dk45zs8ow44ws44@webmail.stanford.edu>

Hello Woollam users,
Does anyone know if the PMMA material reference data (PMMA.mat) is  
correct? I was trying
to measure the thickness of a 2900-3500A 5% 950K PMMA film on 540A  
oxide but the
polynomial fit did not converge. I was getting nasty oscillations at  
all angles and
changing the initial thickness did not help. Any ideas?

Thanks,
Arash


From kocabas at stanford.edu  Tue Mar 25 19:04:20 2008
From: kocabas at stanford.edu (S. Ekin Kocabas)
Date: Tue, 25 Mar 2008 19:04:20 -0700
Subject: PMMA thickness measurement
In-Reply-To: <20080325180024.6dk45zs8ow44ws44@webmail.stanford.edu>
References: <20080325180024.6dk45zs8ow44ws44@webmail.stanford.edu>
Message-ID: <47E9AF24.5030508@stanford.edu>

I spun some PMMA on a carrier wafer and characterized its refractive 
index and saved it as as a '.mat' file. Then, I could use that file to 
fit different PMMA thicknesses pretty well. If you like, the file should 
be under my directory (Miller Group->Kocabas->pmma.mat)

Ekin


Arash Hazeghi said the following on 3/25/2008 6:00 PM:
> Hello Woollam users,
> Does anyone know if the PMMA material reference data (PMMA.mat) is 
> correct? I was trying
> to measure the thickness of a 2900-3500A 5% 950K PMMA film on 540A 
> oxide but the
> polynomial fit did not converge. I was getting nasty oscillations at 
> all angles and
> changing the initial thickness did not help. Any ideas?
>
> Thanks,
> Arash