From ahazeghi at stanford.edu Mon Jul 27 18:26:28 2009 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Mon, 27 Jul 2009 18:26:28 -0700 (PDT) Subject: Help with Woollam Message-ID: <233598147.13021211248744388306.JavaMail.root@zm03.stanford.edu> Greetings Woollam users, I am trying to measure a thin Alumina ALD layer on SiO2 and I want to make a .mat file containing the correct n and k vs wavelength values (the values in Al203.mat file appear to be extrapolated and may not be accurate). Does anyone know how I can generate a .mat file which is readable by woollam? Also I'd like to have a VASE script to take several readings from an area of the sample and take the average, does anyone know how to so this? I appreciate your help Thanks, Arash -------------- next part -------------- An HTML attachment was scrubbed... URL: From zpatel at ubimos.com Mon Jul 27 19:12:26 2009 From: zpatel at ubimos.com (zpatel at ubimos.com) Date: Tue, 28 Jul 2009 02:12:26 +0000 Subject: Help with Woollam In-Reply-To: <233598147.13021211248744388306.JavaMail.root@zm03.stanford.edu> References: <233598147.13021211248744388306.JavaMail.root@zm03.stanford.edu> Message-ID: <20090728021226.jz25yr92e8cgc0w8@ubimos.com> Hello Arash, If you get the method to make a .mat file containing the correct n and k values, Please share the method with us. I am working on Hafnium / Hafnium oxide. It would be very useful that people can have access to correct files. Thank you Zubin Quoting Arash Hazeghi : > Greetings Woollam users, > I am trying to measure a thin Alumina ALD layer on SiO2 and I want > to make a .mat file containing the correct n and k vs wavelength > values (the values in Al203.mat file appear to be extrapolated and > may not be accurate). Does anyone know how I can generate a .mat > file which is readable by woollam? Also I'd like to have a VASE > script to take several readings from an area of the sample and take > the average, does anyone know how to so this? > I appreciate your help > > Thanks, > Arash > Thanking you, Zubin Patel Member of Technical Staff UbiMOS Technologies Inc, 3907 North 1st Street San Jose, CA, 95134 Phone: 408 434 1808 Ext 319 Email: zpatel at ubimos.com From edmyers at stanford.edu Tue Jul 28 07:38:43 2009 From: edmyers at stanford.edu (Ed Myers) Date: Tue, 28 Jul 2009 07:38:43 -0700 Subject: Help with Woollam In-Reply-To: <233598147.13021211248744388306.JavaMail.root@zm03.stanford .edu> References: <233598147.13021211248744388306.JavaMail.root@zm03.stanford.edu> Message-ID: <6.2.5.6.2.20090728073350.034d2570@stanford.edu> Arash, n and k values for thin films are different from the bulk n and k. This probably why you are seeing the variation from the values provided by Woollam. It's not that these values are wrong, it's the fact you have a different film. At film thickness below 10nm the optical constants have a tendency to converge and hence are difficult to quantify without additional measurement techniques. For example, you will need to correlate your n and k values and the resulting thickness to an actual thickness measurement. If you provide me the model, I can develop a VASE program for you. What I will need is the measurement pattern and number of points and your model location and name. Ed At 06:26 PM 7/27/2009, Arash Hazeghi wrote: >Greetings Woollam users, >I am trying to measure a thin Alumina ALD layer on SiO2 and I want >to make a .mat file containing the correct n and k vs wavelength >values (the values in Al203.mat file appear to be extrapolated and >may not be accurate). Does anyone know how I can generate a .mat >file which is readable by woollam? Also I'd like to have a VASE >script to take several readings from an area of the sample and take >the average, does anyone know how to so this? >I appreciate your help > >Thanks, >Arash From ahazeghi at stanford.edu Tue Jul 28 09:32:17 2009 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Tue, 28 Jul 2009 09:32:17 -0700 Subject: Help with Woollam In-Reply-To: <6.2.5.6.2.20090728073350.034d2570@stanford.edu> References: <233598147.13021211248744388306.JavaMail.root@zm03.stanford.edu> <6.2.5.6.2.20090728073350.034d2570@stanford.edu> Message-ID: <000e01ca0fa0$f910eb20$eb32c160$@edu> Thanks Ed, I have the calibrated n and k values for the layer I want to measure, can you clarify how to generate a .mat file that contains these values? I got emails from several other users who also expressed interest in this so it is useful for all of us. Thanks, Arash -----Original Message----- From: Ed Myers [mailto:edmyers at stanford.edu] Sent: Tuesday, July 28, 2009 7:39 AM To: Arash Hazeghi; woollam Subject: Re: Help with Woollam Arash, n and k values for thin films are different from the bulk n and k. This probably why you are seeing the variation from the values provided by Woollam. It's not that these values are wrong, it's the fact you have a different film. At film thickness below 10nm the optical constants have a tendency to converge and hence are difficult to quantify without additional measurement techniques. For example, you will need to correlate your n and k values and the resulting thickness to an actual thickness measurement. If you provide me the model, I can develop a VASE program for you. What I will need is the measurement pattern and number of points and your model location and name. Ed At 06:26 PM 7/27/2009, Arash Hazeghi wrote: >Greetings Woollam users, >I am trying to measure a thin Alumina ALD layer on SiO2 and I want >to make a .mat file containing the correct n and k vs wavelength >values (the values in Al203.mat file appear to be extrapolated and >may not be accurate). Does anyone know how I can generate a .mat >file which is readable by woollam? Also I'd like to have a VASE >script to take several readings from an area of the sample and take >the average, does anyone know how to so this? >I appreciate your help > >Thanks, >Arash