polysilicon recipe

Scott Lee wslee at stanford.edu
Thu Mar 15 17:05:34 PDT 2012


Hi all,

I'm trying to measure the thickness of unannealed polysilicon (in-situ
doped n-type, deposited at 580C) ontop of LTO (about 18000A). I measured
the oxide thickness on woollam before the poly deposition and got a good
fit.

What is the best material recipe to use for poly? Does anyone have
experience with this?

Thanks,
Scott
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