Comment xactix SNF 2007-03-27 14:07:03: Possible bad pump
emyers at snf.stanford.edu
emyers at snf.stanford.edu
Thu Apr 5 14:00:38 PDT 2007
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Shutdown xactix SNF 2007-03-27 14:36:42: The scroll pump is bad, it pump down below 1torr.
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Problem xactix SNF 2007-03-27 12:37:16: main chamber won't pump down
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Pump Replaced
Previous message:
Shutdown xactix SNF 2007-03-27 14:36:42: The scroll pump is bad, it pump down below 1torr.
Next message:
Problem xactix SNF 2007-03-27 12:37:16: main chamber won't pump down
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