Problem xactix SNF 2007-01-26 10:24:51: cannot load wafer,
gyama at snf.stanford.edu
gyama at snf.stanford.edu
Fri Jan 26 10:24:51 PST 2007
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Shutdown xactix SNF 2007-01-16 16:40:49: Pressure gauge failure
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Problem xactix SNF 2007-01-26 10:24:51: cannot load wafer,
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is not giving "YES OK TO UNLOAD" screen
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Shutdown xactix SNF 2007-01-16 16:40:49: Pressure gauge failure
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Problem xactix SNF 2007-01-26 10:24:51: cannot load wafer,
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