Problem xactix SNF 2007-03-27 12:37:16: main chamber won't pump down

kevhuang at snf.stanford.edu kevhuang at snf.stanford.edu
Tue Mar 27 12:37:17 PDT 2007


when purging during the "load/unload" step, chamber pressure is at 2.12 Torr and won't go down.




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