Comment xactix SNF 2007-03-27 14:07:03: Possible bad pump

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Mar 27 14:07:04 PDT 2007


Both of the chamber's pressure is about 1.4 Torr with a leak rate of < 1 mT/min.   Need to isolate pump to check its base pressure




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