From yeh at snf.stanford.edu  Tue Jun 24 15:14:47 2008
From: yeh at snf.stanford.edu (yeh at snf.stanford.edu)
Date: Tue, 24 Jun 2008 15:14:47 -0700
Subject: Problem xactix SNF 2008-06-24 15:14:46: valves 6 and 7 leak
Message-ID: <mailman.62.1356284085.5418.xactix-pcs@snf.stanford.edu>

when pressurizing the expansion chamber, the etch chamber pressure also rises despite the connecting valves (6&7) being closed.