Comment xactix SNF 2008-03-06 05:48:05: Stuck in Pre-Etch Cyclce

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Thu Mar 6 05:48:06 PST 2008


today the tool got stuck in a pre-etch cycle (over 10 minutes without resolution...it appears the pump and the N2 flow were both open at the same time, but that may not be true.  regardless the chamber wouldn't pump down for pre-etch pump and purge after the first pump down.  hard stop exited the situation and trying again, i had no problems.
i was running 3T XeF2 with 2T N2.




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