From jprovine at snf.stanford.edu Tue May 6 09:17:51 2008 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 6 May 2008 09:17:51 -0700 Subject: Shutdown xactix SNF 2008-05-06 09:17:50: expansion chamber pump valve problem Message-ID: the pre-etch cycles can not achieve preset values even after 35 minutes of cycles. a sensor re-calibration was attempted, but could not complete because the valve from the expansion chamber to the pump would not open to complete pump after purge cycle. this valve will open under normal operation, but without sensor recalibration the etch cycle cannot begin. elmer is going to take a look at it as soon as he can. From eenriquez at snf.stanford.edu Tue May 6 14:07:34 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 6 May 2008 14:07:34 -0700 Subject: Shutdown xactix SNF 2008-05-06 09:17:50: expansion chamber pump valve problem Message-ID: Recalibrated the gauges. Prior to calibration, both gauges based out at -27 Torr. From emyers at snf.stanford.edu Mon May 12 08:48:19 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 May 2008 08:48:19 -0700 Subject: Comment xactix SNF 2008-02-15 08:04:53: leak update Message-ID: Leak may come from the top of the bottle. Used torr seal to an attempt to seal the leak. From emyers at snf.stanford.edu Mon May 12 08:48:25 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 May 2008 08:48:25 -0700 Subject: Comment xactix SNF 2008-02-15 16:37:56: more leak data Message-ID: Leak may come from the top of the bottle. Used torr seal to an attempt to seal the leak. From emyers at snf.stanford.edu Mon May 12 08:48:32 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 May 2008 08:48:32 -0700 Subject: Comment xactix SNF 2008-02-18 10:15:01: leak Message-ID: Leak may come from the top of the bottle. Used torr seal to an attempt to seal the leak. From emyers at snf.stanford.edu Mon May 12 08:48:47 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 May 2008 08:48:47 -0700 Subject: Comment xactix SNF 2008-02-27 13:16:13: Gas bottle Message-ID: Noted From emyers at snf.stanford.edu Mon May 12 08:50:03 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 May 2008 08:50:03 -0700 Subject: Comment xactix SNF 2008-03-06 05:48:05: Stuck in Pre-Etch Cyclce Message-ID: Need to do gauge calibration. This is a common fault if the tool is not used offen and is accentutated by not running the pump full time. From emyers at snf.stanford.edu Mon May 12 08:50:19 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 May 2008 08:50:19 -0700 Subject: Comment xactix SNF 2008-03-06 07:47:52: Gauge calibration Message-ID: Complete From emyers at snf.stanford.edu Mon May 12 08:50:31 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 May 2008 08:50:31 -0700 Subject: Comment xactix SNF 2008-03-10 15:27:37: follow-up to leak Message-ID: Leak may come from the top of the bottle. Used torr seal to an attempt to seal the leak. From emyers at snf.stanford.edu Mon May 12 08:50:47 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 May 2008 08:50:47 -0700 Subject: Comment xactix SNF 2008-04-08 15:07:50: Leak update Message-ID: Noted From emyers at snf.stanford.edu Mon May 12 08:51:34 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 May 2008 08:51:34 -0700 Subject: Comment xactix SNF 2008-04-16 09:11:10: loud ramp up for pump Message-ID: This results for turning on the pump. It is common since we interlocked the pump to Coral. From emyers at snf.stanford.edu Mon May 12 08:52:23 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 May 2008 08:52:23 -0700 Subject: Problem xactix SNF 2008-02-04 15:29:18: Source Chamber Leak Message-ID: Leak may come from the top of the bottle. Used torr seal to an attempt to seal the leak. From emyers at snf.stanford.edu Mon May 12 08:52:35 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 May 2008 08:52:35 -0700 Subject: Comment xactix SNF 2007-10-26 12:51:46: expansion chamber pumpdown Message-ID: Leak may come from the top of the bottle. Used torr seal to an attempt to seal the leak. From emyers at snf.stanford.edu Mon May 12 08:52:42 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 May 2008 08:52:42 -0700 Subject: Comment xactix SNF 2007-10-26 12:53:05: source chamber leak Message-ID: Leak may come from the top of the bottle. Used torr seal to an attempt to seal the leak. From emyers at snf.stanford.edu Mon May 12 08:52:48 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 May 2008 08:52:48 -0700 Subject: Comment xactix SNF 2008-02-04 14:14:55: source chamber leak? Message-ID: Leak may come from the top of the bottle. Used torr seal to an attempt to seal the leak. From emyers at snf.stanford.edu Mon May 12 08:53:10 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 May 2008 08:53:10 -0700 Subject: Comment xactix SNF 2008-02-06 12:25:21: Update Message-ID: Leak may come from the top of the bottle. Used torr seal to an attempt to seal the leak. From yeh at snf.stanford.edu Tue May 27 17:24:08 2008 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Tue, 27 May 2008 17:24:08 -0700 Subject: Comment xactix SNF 2008-05-27 17:24:07: source chamber pressure high Message-ID: found expansion chamber + expansion chamber pressure at >100torr. last use 8 days ago. also found a dymo label inside etch chamber.