From emyers at snf.stanford.edu Mon Aug 3 13:38:07 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 3 Aug 2009 13:38:07 -0700 Subject: Comment xactix SNF 2009-08-03 13:38:06: Won't pass bottle purge Message-ID: The leak near the bottle seems to cause the bottle change routine to go in to an infinate cycle. I need to contact Xactix regarding a safe approach to changing the bottle. From emyers at snf.stanford.edu Wed Aug 5 09:31:42 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 5 Aug 2009 09:31:42 -0700 Subject: Comment xactix SNF 2009-08-05 09:31:41: Bottle Leak Test Message-ID: I ran the leak test procedures I received from Xactix. I passed their requirements, but system will still not pass the change bottle routine. I left the system pumping up to the bottle shut-off valve. I will work with Elmer and Mike regarding a safe way of removing and disposing of the old XeF2 bottle. From eenriquez at snf.stanford.edu Wed Aug 5 17:13:50 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 5 Aug 2009 17:13:50 -0700 Subject: Shutdown xactix SNF 2009-07-31 07:47:30: Need Bottle Change Message-ID: Completed the bottle change. Cylinder pressure is about 4.5 Torr. From eenriquez at snf.stanford.edu Wed Aug 5 17:14:10 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 5 Aug 2009 17:14:10 -0700 Subject: Comment xactix SNF 2009-07-01 09:59:30: Old XeF2 Bottle Message-ID: Archived From eenriquez at snf.stanford.edu Wed Aug 5 17:16:12 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 5 Aug 2009 17:16:12 -0700 Subject: Comment xactix SNF 2009-08-03 13:38:06: Won't pass bottle purge Message-ID: Manually pumped and purged the gas line. Completed the cylinder change. From emyers at snf.stanford.edu Fri Aug 7 09:43:05 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 7 Aug 2009 09:43:05 -0700 Subject: Problem xactix SNF 2008-06-24 15:14:46: valves 6 and 7 leak Message-ID: I see a slight rate of rise when the expansion chamber is pumped down or if their XeF2 in the expansion chamber. The specification call for the chamber not to leak up above 10 torr in 2 hours. This is being met. With the replacement of the XF2 bottle we no longer see the pressure build up between the bottle and the isolation valve. The new bottle and valve design has corrected the old bottle design weakness. From emyers at snf.stanford.edu Fri Aug 7 09:43:58 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 7 Aug 2009 09:43:58 -0700 Subject: Comment xactix SNF 2008-05-27 17:24:07: source chamber pressure high Message-ID: New XeF2 bottle appears to have a much lower leak rate. From emyers at snf.stanford.edu Fri Aug 7 09:44:13 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 7 Aug 2009 09:44:13 -0700 Subject: Comment xactix SNF 2008-08-22 09:13:45: Gauge Recalibration Message-ID: Archived From emyers at snf.stanford.edu Fri Aug 7 09:44:35 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 7 Aug 2009 09:44:35 -0700 Subject: Comment xactix SNF 2009-01-05 10:39:40: New Year Start-Up Message-ID: Archived From emyers at snf.stanford.edu Fri Aug 7 09:44:49 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 7 Aug 2009 09:44:49 -0700 Subject: Comment xactix SNF 2009-07-26 15:38:30: ran gauge calibration 07/26/2009 Message-ID: Archived From emyers at snf.stanford.edu Fri Aug 7 09:45:19 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 7 Aug 2009 09:45:19 -0700 Subject: Comment xactix SNF 2009-08-05 09:31:41: Bottle Leak Test Message-ID: Elmer changed out the XeF2 bottle. From emyers at snf.stanford.edu Fri Aug 7 09:47:27 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 7 Aug 2009 09:47:27 -0700 Subject: Comment xactix SNF 2009-08-07 09:47:27: New XeF2 Bottle Message-ID: The new XeF2 bottle has been installed. Ran all the leak test routines provided by Xactix. They all passed. The leak between the bottle and the first isolation valve is gone. The new bottles are shipped with a new valve design which corrected the leakage problem of the old design. From komadina at snf.stanford.edu Wed Aug 19 16:42:27 2009 From: komadina at snf.stanford.edu (komadina at snf.stanford.edu) Date: Wed, 19 Aug 2009 16:42:27 -0700 Subject: Problem xactix SNF 2009-08-19 16:42:26: pre-etch cycling Message-ID: Pre-etch cycling taking a long time. It's been 20 minutes and the pressure is reading around NEGATIVE 7 torr in both chambers. Last calibration listed as 1 hour ago. Stop button clicked, and now it's stuck "cancelling pre-etch cycles". I left the station enabled to avoid further complicating things, and my sample is trapped inside (can be discarded). From jrjain at snf.stanford.edu Thu Aug 20 00:20:48 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Thu, 20 Aug 2009 00:20:48 -0700 Subject: Shutdown xactix SNF 2009-08-20 00:20:48: Process stuck in pre-etch cycles Message-ID: See jkoma's comment From emyers at snf.stanford.edu Thu Aug 20 08:22:10 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 20 Aug 2009 08:22:10 -0700 Subject: Problem xactix SNF 2009-08-19 16:42:26: pre-etch cycling Message-ID: Started gauge recalibration routine. These faults stem from not having the pump running at all times and aborting a pumpdown or recalibration routine in the middle. System should be ready around 9:30am. From emyers at snf.stanford.edu Thu Aug 20 08:22:19 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 20 Aug 2009 08:22:19 -0700 Subject: Shutdown xactix SNF 2009-08-20 00:20:48: Process stuck in pre-etch cycles Message-ID: Started gauge recalibration routine. These faults stem from not having the pump running at all times and aborting a pumpdown or recalibration routine in the middle. System should be ready around 9:30am. From emyers at snf.stanford.edu Fri Aug 28 11:59:52 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 28 Aug 2009 11:59:52 -0700 Subject: Comment xactix SNF 2009-08-28 11:59:51: Gauge Calibration Message-ID: Started gauge calibration after power outage. Should be ready by 1pm.