From daesung at snf.stanford.edu Mon Nov 2 14:22:57 2009 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Mon, 2 Nov 2009 14:22:57 -0800 Subject: Problem xactix SNF 2009-11-02 14:22:57: Main etch step not working Message-ID: The process is stuck in "perform etch pre-cycles" for ever and cannot proceed to the main etch step. From emyers at snf.stanford.edu Mon Nov 2 16:47:06 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 2 Nov 2009 16:47:06 -0800 Subject: Problem xactix SNF 2009-11-02 14:22:57: Main etch step not working Message-ID: Ran gauge recalibration routine. There appeared to be a bad gauge calibration ran on Saturday. Verified it made if to the etch cycles using the standard recipe. From emyers at snf.stanford.edu Mon Nov 2 16:47:12 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 2 Nov 2009 16:47:12 -0800 Subject: Comment xactix SNF 2009-10-28 20:49:54: Guage Recalibration Frozen and Cancelled Message-ID: Ran gauge recalibration routine. There appeared to be a bad gauge calibration ran on Saturday. Verified it made if to the etch cycles using the standard recipe.