Problem xactix SNF 2009-11-02 14:22:57: Main etch step not working

emyers at snf.stanford.edu emyers at snf.stanford.edu
Mon Nov 2 16:47:06 PST 2009


Ran gauge recalibration routine.  There appeared to be a bad gauge calibration ran on Saturday.  Verified it made if to the etch cycles using the standard recipe.




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