From jprovine at snf.stanford.edu Sun Aug 29 12:12:16 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 29 Aug 2010 12:12:16 -0700 Subject: Problem xactix SNF 2010-08-29 12:12:15: expansion chamber pressure issue Message-ID: the system will not begin etches or finish gauge calibration because of an issue with the expansion chamber pressure. the valve to vacuum for the expansion chamber will not open during gauge calibration or pre-etch cycle testing. the chamber fills to a reading of almost 90Torr from the N2 line. however, the valve will open when the software is closed. reboot of the software and reboot of the computer failed to change affect the problem in any way. leak check and chamber purge all pass acceptably, so issue is localized to the expansion chamber and related valves. system is not usuable currently because etch pre-cycles will not complete. From emyers at snf.stanford.edu Mon Aug 30 08:48:46 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 30 Aug 2010 08:48:46 -0700 Subject: Comment xactix SNF 2010-08-30 08:48:45: gauge Recalibration Message-ID: Did a fast calibration and now the system is running a full gauge calibration routine. Should be completed around 10am. From emyers at snf.stanford.edu Mon Aug 30 12:26:21 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 30 Aug 2010 12:26:21 -0700 Subject: Problem xactix SNF 2010-08-29 12:12:15: expansion chamber pressure issue Message-ID: Ran short calibration to get the system to respond. Ran the standard gauge recalibration and system is responding correctly. From emyers at snf.stanford.edu Mon Aug 30 12:26:30 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 30 Aug 2010 12:26:30 -0700 Subject: Comment xactix SNF 2010-08-30 08:48:45: gauge Recalibration Message-ID: Ran short calibration to get the system to respond. Ran the standard gauge recalibration and system is responding correctly.