Problem xactix SNF 2010-08-29 12:12:15: expansion chamber pressure issue

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Sun Aug 29 12:12:16 PDT 2010


the system will not begin etches or finish gauge calibration because of an issue with the expansion chamber pressure.  the valve to vacuum for the expansion chamber will not open during gauge calibration or pre-etch cycle testing.  the chamber fills to a reading of almost 90Torr from the N2 line.  however, the valve will open when the software is closed.
reboot of the software and reboot of the computer failed to change affect the problem in any way.  leak check and chamber purge all pass acceptably, so issue is localized to the expansion chamber and related valves.
system is not usuable currently because etch pre-cycles will not complete.




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