From rik at snf.stanford.edu  Sat Feb 13 22:08:18 2010
From: rik at snf.stanford.edu (rik at snf.stanford.edu)
Date: Sat, 13 Feb 2010 22:08:18 -0800
Subject: Problem xactix SNF 2010-02-13 22:08:17: Weird pump sounds ...
Message-ID: <mailman.140.1356284085.5418.xactix-pcs@snf.stanford.edu>

Started an etch. The pre-etch went on for 10+ mins, so I hit "Stop" after which the pump started making weird grinding sounds ...



From rik at snf.stanford.edu  Sat Feb 13 22:09:37 2010
From: rik at snf.stanford.edu (rik at snf.stanford.edu)
Date: Sat, 13 Feb 2010 22:09:37 -0800
Subject: Comment xactix SNF 2010-02-13 22:09:37: Wafer still in system
Message-ID: <mailman.141.1356284085.5418.xactix-pcs@snf.stanford.edu>

My wafer is still in the system and is an extremely important one. Please keep it the single wafer box I left on the desk. 



From rik at snf.stanford.edu  Sat Feb 13 22:15:57 2010
From: rik at snf.stanford.edu (rik at snf.stanford.edu)
Date: Sat, 13 Feb 2010 22:15:57 -0800
Subject: Comment xactix SNF 2010-02-13 22:15:56: Got my wafer out using a hard stop
Message-ID: <mailman.142.1356284085.5418.xactix-pcs@snf.stanford.edu>




From yiyang at snf.stanford.edu  Sun Feb 21 18:39:40 2010
From: yiyang at snf.stanford.edu (yiyang at snf.stanford.edu)
Date: Sun, 21 Feb 2010 18:39:40 -0800
Subject: Comment xactix SNF 2010-02-21 18:39:40: calibration
Message-ID: <mailman.143.1356284085.5418.xactix-pcs@snf.stanford.edu>

Calibration keeps stopping without someone enabled



From emyers at snf.stanford.edu  Mon Feb 22 11:13:51 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Mon, 22 Feb 2010 11:13:51 -0800
Subject: Comment xactix SNF 2010-02-21 18:39:40: calibration
Message-ID: <mailman.144.1356284086.5418.xactix-pcs@snf.stanford.edu>

Yes, the pump is tied into the Coral interlock.  The system must be enable for the pump to run which is required during the gauge calibration.



From emyers at snf.stanford.edu  Mon Feb 22 11:14:06 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Mon, 22 Feb 2010 11:14:06 -0800
Subject: Comment xactix SNF 2010-02-13 22:15:56: Got my wafer out using a hard stop
Message-ID: <mailman.145.1356284086.5418.xactix-pcs@snf.stanford.edu>

archived



From emyers at snf.stanford.edu  Mon Feb 22 11:14:12 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Mon, 22 Feb 2010 11:14:12 -0800
Subject: Comment xactix SNF 2010-02-13 22:09:37: Wafer still in system
Message-ID: <mailman.146.1356284086.5418.xactix-pcs@snf.stanford.edu>

archived



From emyers at snf.stanford.edu  Mon Feb 22 11:14:34 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Mon, 22 Feb 2010 11:14:34 -0800
Subject: Problem xactix SNF 2010-02-13 22:08:17: Weird pump sounds ...
Message-ID: <mailman.147.1356284086.5418.xactix-pcs@snf.stanford.edu>

Usually means the lid is not fully closed.  Archived