Problem xactix SNF 2010-02-13 22:08:17: Weird pump sounds ...

rik at snf.stanford.edu rik at snf.stanford.edu
Sat Feb 13 22:08:18 PST 2010

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Started an etch. The pre-etch went on for 10+ mins, so I hit "Stop" after which the pump started making weird grinding sounds ...

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