Problem xactix SNF 2010-01-25 11:33:27: Sample stuck in chamber

dalyx at snf.stanford.edu dalyx at snf.stanford.edu
Mon Jan 25 11:33:27 PST 2010


Ran an etch one time, then clicked Load/Unload button to unload the sample. After a few cycles of pump / purge, error came out: "Unable to lock shroud. This could occur if door is not completely closed. Try closing the door and press OK. Otherwise press cancel to cancel this operation." Clicking OK doesn't do anything, clicking cancel cancels the venting of the chamber.




More information about the xactix-pcs mailing list