From jprovine at snf.stanford.edu  Mon Mar 29 17:34:03 2010
From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu)
Date: Mon, 29 Mar 2010 17:34:03 -0700
Subject: Shutdown xactix SNF 2010-03-29 17:34:02: cannot perform pump purge or recalibrate
Message-ID: <mailman.148.1356284086.5418.xactix-pcs@snf.stanford.edu>

the system gauges are off.  the etch chamber pressure only reads to 87 Torr even though it will vent to atmosphere.  without an accurate gauge reading it will not go through the pump purge cycles necessary to load a sample.  with uncertain pressures, i did not try an etch run.  the pressure gauges would not recalibrate under maintainence because of the same pressure max errors.  pump seems fine, fyi.



From eenriquez at snf.stanford.edu  Tue Mar 30 09:22:45 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 30 Mar 2010 09:22:45 -0700
Subject: Shutdown xactix SNF 2010-03-29 17:34:02: cannot perform pump purge or recalibrate
Message-ID: <mailman.149.1356284086.5418.xactix-pcs@snf.stanford.edu>

Recalibrated gauges.
When gauge calibrations are way out, the automatic calibration routine at the default setting will not work.  To get around this problem:  In the calibration screen, 1) set the number of pump purge cycles to 0
2) set the hard pumpdown time to 1 minute and then run the calibration.
3) When the routine has completed, press Done
4) Perfom another gauge calibration with the various parameters at the default settings.