From mdickey at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Shutdown xactix SNF 2012-08-07 06:47:39: gas Message-ID: <13959487.42.1344347259815.JavaMail.coral@shine> Down for gas bottle change From mdickey at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Shutdown xactix SNF 2012-08-07 06:47:39: gas Message-ID: <14970536.76.1344456500433.JavaMail.coral@shine> replaced gas bottle and did a calibration From mdickey at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Problem xactix SNF 2012-07-24 18:55:34: XeF2 #1 low level Message-ID: <21814421.83.1344523083010.JavaMail.coral@shine> not anymore. bottle changed From eenriquez at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Comment xactix SNF 2012-07-31 07:56:02: XeF2 remaining Message-ID: <17092249.22.1349469212809.JavaMail.coral@shine> archived From eenriquez at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Comment xactix SNF 2012-07-30 15:13:50: XeF2 level is at 21% Message-ID: <7918822.23.1349469226956.JavaMail.coral@shine> archived From eenriquez at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Comment xactix SNF 2012-07-27 16:52:18: Low level of XeF2 Message-ID: <22053093.24.1349469234035.JavaMail.coral@shine> archived From eenriquez at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Comment xactix SNF 2012-07-26 10:17:40: Calibrated vacuum gauges Message-ID: <5105880.25.1349469239092.JavaMail.coral@shine> archived From eenriquez at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Comment xactix SNF 2012-06-28 15:46:47: mouse is fixed. Message-ID: <12722647.26.1349469245161.JavaMail.coral@shine> archived From eenriquez at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Comment xactix SNF 2012-05-31 07:41:46: bulb Message-ID: <30296187.27.1349469252229.JavaMail.coral@shine> archived From zguo at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Shutdown xactix SNF 2012-10-22 20:46:40: Can not log in to the system Message-ID: <10254663.30.1350964001017.JavaMail.coral@shine> After enable, can not open the log in window thus can not operate the equipment. From eenriquez at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Shutdown xactix SNF 2012-10-22 20:46:40: Can not log in to the system Message-ID: <22726973.34.1351005251754.JavaMail.coral@shine> No problem found. Had no problem logging in to the system after I enabled the tool. From jaehlee at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Problem xactix SNF 2012-10-24 19:21:39: temperature stabilizing issues Message-ID: <29663346.80.1351131700159.JavaMail.coral@shine> It won't let me go to the next step after pressing load/unload. From jaehlee at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Problem xactix SNF 2012-10-24 19:27:23: pressure doesn't go below 10 Torr Message-ID: <28037270.81.1351132044204.JavaMail.coral@shine> I left my wafers inside and disabling it now. From eenriquez at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Problem xactix SNF 2012-10-24 19:21:39: temperature stabilizing issues Message-ID: <14124120.85.1351178075432.JavaMail.coral@shine> Adjusted the gas box setpoint. From eenriquez at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Problem xactix SNF 2012-10-24 19:27:23: pressure doesn't go below 10 Torr Message-ID: <29164000.86.1351178153442.JavaMail.coral@shine> Recovered the user' wafer and placed in a wafer holder. The holder is next to the monitor. From eenriquez at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Shutdown xactix SNF 2012-10-25 10:44:56: Vacuum pump problem Message-ID: <11631652.90.1351187097454.JavaMail.coral@shine> Vacuum pump needs to be rebuilt. It only pumps down to 7 Torr. From eenriquez at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Comment xactix SNF 2012-10-25 14:34:53: Update Message-ID: <28906691.102.1351200894472.JavaMail.coral@shine> The pump will be sent out to be rebuilt. The system should be ready by 11/2. From eenriquez at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Comment xactix SNF 2012-11-01 11:53:52: Update Message-ID: <9261261.152.1351796033094.JavaMail.coral@shine> Vacuum pump that has been sent out for repair will not be ready until 11/6 From gyama at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Comment xactix SNF 2012-11-01 16:19:00: can we get a spare pump Message-ID: <22402264.162.1351811941698.JavaMail.coral@shine> so the tool isn't down for such a long time? From eenriquez at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Shutdown xactix SNF 2012-10-25 10:44:56: Vacuum pump problem Message-ID: <8605069.24.1352149593123.JavaMail.coral@shine> Installed rebuilt vacuum pump and performed gauge calibration. From eenriquez at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Comment xactix SNF 2012-10-25 14:34:53: Update Message-ID: <15179619.25.1352149599142.JavaMail.coral@shine> Installed rebuilt vacuum pump and performed gauge calibration. From eenriquez at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Comment xactix SNF 2012-11-01 11:53:52: Update Message-ID: <1367226.26.1352149658274.JavaMail.coral@shine> Installed rebuilt vacuum pump and performed gauge calibration. From svo at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: svo at snf.stanford.edu (svo at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Comment xactix SNF 2012-11-06 20:00:50: spare pump Message-ID: <32277724.38.1352260851156.JavaMail.coral@shine> agree with Gary! From rehanna at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: rehanna at snf.stanford.edu (rehanna at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Comment xactix SNF 2012-11-07 16:46:42: Problem with shroud Message-ID: <11132098.13.1352335603377.JavaMail.coral@shine> The Xactix gave a warning that the shroud was not closed and locked and did not let me unload my wafer, although the shroud was in place. It worked after 3 attempts. Maybe sensor malfunction? From rehanna at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: rehanna at snf.stanford.edu (rehanna at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Comment xactix SNF 2012-11-07 16:47:37: Pump failure Message-ID: <22013750.14.1352335657476.JavaMail.coral@shine> The Xactix gave a warning as I opened the chamber of a vacuum pump failure, but it went away as soon as I closed the chamber. From gyama at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Problem xactix SNF 2012-11-28 08:41:48: pump was pretty noisy this morning Message-ID: <18554820.35.1354120908550.JavaMail.coral@shine> don't know if it quited down From eenriquez at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Problem xactix SNF 2012-11-28 08:41:48: pump was pretty noisy this morning Message-ID: <27470082.8.1354160349561.JavaMail.coral@shine> The pump quieted down. From eenriquez at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Comment xactix SNF 2012-12-07 10:30:21: Zeroed the pressure gauges Message-ID: <10795196.25.1354905022069.JavaMail.coral@shine> The XeF2 cylinder is 80% full. From gyama at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Problem xactix SNF 2012-12-19 12:40:00: main vacuum failure on screen Message-ID: <32725674.29.1355949600560.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Sun Dec 23 09:34:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:34:44 -0000 Subject: Problem xactix SNF 2012-12-19 12:40:00: main vacuum failure on screen Message-ID: <31693436.38.1355968390137.JavaMail.coral@shine> User disabled the tool before completing the process