Comment xactix SNF 2012-11-07 16:46:42: Problem with shroud

rehanna at snf.stanford.edu rehanna at snf.stanford.edu
Sun Dec 23 09:34:44 PST 2012


The Xactix gave a warning that the shroud was not closed and locked and did not let me unload my wafer, although the shroud was in place. It worked after 3 attempts. Maybe sensor malfunction?



More information about the xactix-pcs mailing list