Comment xactix SNF 2012-11-07 16:46:42: Problem with shroud

rehanna at rehanna at
Sun Dec 23 09:34:44 PST 2012

The Xactix gave a warning that the shroud was not closed and locked and did not let me unload my wafer, although the shroud was in place. It worked after 3 attempts. Maybe sensor malfunction?

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