Comment xactix SNF 2012-03-01 11:48:21: Update

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Thu Mar 1 11:48:21 PST 2012


The valve array has been contracted for fix by the vendor.  Simultaneously, an upgrade to the system will be undertaken.  this will add a heater to the etch chamber which xactix has shown can significantly improve etch rates.  the system can be run exactly as before by simply not using the heater, so the changes should not effect users with established processes.
current anticipated date for repairs and completion of upgrade by xactix engineers is march 9, 2012.




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