From alexneu at stanford.edu Fri Dec 3 14:34:38 2010 From: alexneu at stanford.edu (Alex Neuhausen) Date: Fri, 3 Dec 2010 14:34:38 -0800 Subject: could someone please run two short test etches for me? Message-ID: Hi Xactix users, I want to try using XeF2 to etch a thin layer of PECVD oxide on top of a gold layer. I've been using the MRC etcher, but it ends up contaminating and sputtering away some of the underlying gold at the end of the etch. My features are small enough that wet etching isn't an option either. While XeF2 very slowly etches silicon dioxide, electron and ion beam excitation have been shown to substantially enhance the etch rate. http://jap.aip.org/resource/1/japiau/v50/i5/p3189_s1 http://avspublications.org/jvstb/resource/1/jvtbd9/v28/i5/p946_s1 I want to see if I get a similar effect from placing a small UV lamp on top of the Xactix etcher. Could someone please run two short etches for me to test this? If you don't have time to run these but are planning to use the machine in the next few days, please let me know if I can shadow your session. Best, Alex -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrjain at stanford.edu Mon Dec 13 21:16:20 2010 From: jrjain at stanford.edu (Raja Jain) Date: Mon, 13 Dec 2010 21:16:20 -0800 Subject: xactix free tonight Message-ID: <001501cb9b4e$0bbef750$233ce5f0$@edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: